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Ion Source for Ion Implementation Machine

(Summary description)Tungsten-molybdenum components of ion sources of ion implementation machines in the semiconductor industry Ion implementation is a very important technology in modern integrated circuit manufacturing. Ion implementation machines are applied to realize the doping of semiconductors, namely tungsten filaments are used as emission electrons on the cathodes to impact gas molecules containing specific impurity elements; specific impurity atoms generating ionization are stricken onto the surfaces of silicon single crystal wafers after acceleration in electrostatic fields and stricken into semiconductors to change the conduction characteristics and finally form transistor structures.

Ion Source for Ion Implementation Machine

(Summary description)Tungsten-molybdenum components of ion sources of ion implementation machines in the semiconductor industry

Ion implementation is a very important technology in modern integrated circuit manufacturing. Ion implementation machines are applied to realize the doping of semiconductors, namely tungsten filaments are used as emission electrons on the cathodes to impact gas molecules containing specific impurity elements; specific impurity atoms generating ionization are stricken onto the surfaces of silicon single crystal wafers after acceleration in electrostatic fields and stricken into semiconductors to change the conduction characteristics and finally form transistor structures.

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Ion Source for Ion Implementation Machine

Tungsten-molybdenum components of ion sources of ion implementation machines in the semiconductor industry

Ion implementation is a very important technology in modern integrated circuit manufacturing. Ion implementation machines are applied to realize the doping of semiconductors, namely tungsten filaments are used as emission electrons on the cathodes to impact gas molecules containing specific impurity elements; specific impurity atoms generating ionization are stricken onto the surfaces of silicon single crystal wafers after acceleration in electrostatic fields and stricken into semiconductors to change the conduction characteristics and finally form transistor structures.

 

Ion Source for Ion Implementation Machine

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Heater 2017-11-21 00:00:00
With extremely low saturated vapor pressure, low thermal expansion coefficient and extremely good high-temperature strength, tungsten and molybdenum materials are the best choice for high-temperature in-furnace heating elements.
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Shielding 2017-11-21 00:00:00
Tungsten-molybdenum materials are suitable to be used for shielding at the temperature of 1,300℃ to 2,800℃, which reserve the heat in an effective interval in the modes of heat reflection and convection obstruction.
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Hot Isostatic Pressing Cylinder 2017-11-21 00:00:00
Heat screens applied in hot isostatic presses are called hot isostatic pressing cylinders. Hot isostatic pressing cylinders have higher requirements than common heat screens when working under the conditions of 2000℃ and 2000MPa. To ensure the air tightness, Achemetal has adopted a thermal spraying process based on welding.
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Crucible 2017-11-21 00:00:00
Tungsten powder or molybdenum powder is directly subjected to sintering molding or hot isostatic pressing molding, and is mostly used for manufacturing large crucibles of sintering furnaces, crystal growth furnaces, glass smelting and rear earth smelting equipment. Particularly, these kinds of crucibles are used in furnaces of growing sapphire crystals by KY method, EFG method and heat exchange method in large quantity. Usually, the wall thickness is 8-15mm; the diameter is 100-600mm; the height is 50-700mm. The purity of these kinds of crucibles: W≥99.95%; the density usually can reach 18.2g/cm3; and the density can reach more than 18.8g/cm3 by a hot isostatic pressing technology as required specially. The density of molybdenum crucibles usually can reach about 10.0g/cm³.
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Loaded Boat 2017-11-21 00:00:00
In sintering furnaces or thermal treatment furnaces, tungsten or molybdenum materials are required to be prepared into containers when the processed materials are powder or granules. Loaded boats can be designed in different shapes according to different shapes and ventilation conditions of the processed materials. Achemetal can provide boat vessels made of pure tungsten, pure molybdenum as well as tungsten alloy and molybdenum alloy according different requirements on the operating temperature and strength as well as purity. Tungsten-molybdenum loaded boats manufactured by Achemetal feature good high-temperature deformation resistance and high dimensional accuracy.  
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Rack 2017-11-21 00:00:00
Racks are used for placing and transferring workpieces needing to be processed in high-temperature annealing furnaces and sintering furnaces, and have extremely high requirements on the high-temperature strength of materials for manufacturing racks. Achemetal can manufacture pure tungsten, pure molybdenum, molybdenum-lanthanum alloy and titanium-zirconium-molybdenum alloy racks, to enhance creep resistance and high-temperature strength of materials. 
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Fastener 2017-11-21 00:00:00
Achemetal can provide you with tungsten or molybdenum screws or nuts of British system or metric system.
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Tungsten-molybdenum Material for Monocrystalline Silicon Furnace 2017-11-21 00:00:00
With high-temperature resistance and low volatility, tungsten-molybdenum materials are widely applied to monocrystalline silicon furnaces and polycrystalline silicon furnaces.
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