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The principle of electron beam evaporation: kinetic energy is applied onto evaporation materials under the electric field action of electronics, so evaporation materials can be heated to vaporize, thus realizing evaporation coating.

Electron gun is an electron beam evaporation source, which is composed of a filament as well as a cathode, a beam-forming electrode and an anode connected with the filament. The filament and the cathode are usually made of tungsten or molybdenum materials.

Heating Features of Electron Guns:

1. Electron gun heating has higher energy density than resistance heating, can be used for evaporating high-melting-point materials such as W, Mo, Al2O3, etc., and can obtain a higher evaporation rate;

2. Materials to be evaporated are placed in water cooling copper crucibles, which can prevent crucible materials from being polluted and can be used for preparing high-purity films;

3. Electron gun evaporation particles have higher kinetic energy, which is beneficial to obtain compact film layers with good binding force.