In recent years, molybdenum series alloy targets serving as electrode and wiring materials for LCDs, PDPs and other flat-panel displays have been increasingly concerned by people. In TFT-LCD, gate electrodes are key parts which mainly used Cr/A1 as a gate electrode material before. With the enlargement and high precision trend, flat-panel displays have increasingly high requirements on the specific impedance of materials, and the specific impedance and film stress of molybdenum are only 1/2 of those of chromium. Meanwhile, hexavalent Cr will be generated in the etching process, which is harmful to the environment and health, so increasingly more companies switch to use Mo/A1 as a gate electrode material now, which requires increasingly higher requirements on Mo targets. In the application of molybdenum targets, molybdenum alloy is researched increasingly more, thus further improving the corrosion resistance (discoloration) and adherence (film stripping) of pure molybdenum. If V, Nb, W and Ta are added into molybdenum, the specific resistance, stress, corrosion resistance and various other properties of molybdenum will be improved better.
Due to the adoption of hot isostatic pressing technologies, 10% molybdenum-niobium plane targets and rotating targets produced by AKM can reach the density of more than 9.7g/cm3, with the structure uniformity, purity and other indexes winning good praises from customers.
Molybdenum-niobium targets manufactured by AKM in vacuum sintering and hot isostatic pressing modes have the niobium content of 5% or 10%. With good compactness and uniformity, the products have passed the certification of foreign well-known manufacturers.
Molybdenum-niobium plane target 10*112*210
Molybdenum-niobium rotating target φ151*φ135*750
▲Targets for film coating in the TFT-LCD industry