With the enlargement and high precision trend, flat-panel displays have increasingly high requirements on the specific impedance of materials. Increasingly more display screen manufacturers choose MOTA alloy targets with the highest resistance as a gate electrode material, so the demands of molybdenum-tantalum targets increase sharply. However, with the improvement of production efficiency, display panel production equipment has made progresses that G4, G5 and G6 generations are being used in large quantity while G12 generation will be also used for installation in large quantity recently. Therefore, single breadth dimensions of molybdenum and molybdenum alloy targets have become the bottleneck of production.
Molybdenum-tantalum processes researched and developed by AKM have the advantages of obtaining uniform fine-grained structures and large-sized tungsten-molybdenum alloy targets, saving raw materials, achieving high production efficiency, etc. Molybdenum-based alloy targets can reach the maximum specifications of 1,130*1,200*10mm. In the targets, the relative density of pure molybdenum is over 99.5%, and the relative density of alloy is over 97%; the grain size of pure molybdenum is less than 75μm, and the grain size of alloy is less than 30μm; the thermal resistance of films is less than 5%, and the welded rate with back plates is over 98%; the film uniformity after target film formation is over 95%; the performance indexes of materials reach the international advanced level; all the above features meet the requirements of panel display and packaged manufacturing of TFT-LCDs and PDPs.
Molybdenum-tantalum targets of our company are mainly applied to: