Molybdenum-tantalum Target
Molybdenum-tantalum targets produced by Achemetal Tungsten & Molybdenum Co., Ltd. include plane molybdenum-tantalum targets.
Features of targets manufactured by Achemetal
1. Due to the adoption of a hot isostatic pressing process, the product features high density, good compactness and uniform crystal grains;
2. Higher machining property;
3. Relative density of targets: over 99%, relative density of alloy: over 97%; grain size: less than 50um; thermal resistance of films: below 5%; welded rate with back plates: over 98%, film uniformity after target film formation: over 95%;
| Molybdenum-tantalum Target Parameters | ||
| Element | MoTa | |
| Composition ratio | Mo | |
| Ta 6.0at% | ||
| Purity | >99.95% | |
| Dimension | 1130mm×1200mmX10mm | |
| Density | 10.2--10.5g/cm3 | |
| Hardness | HV5:205--240 | |
| Grain Size | 48μm | |
| Appearance | Ra≤0.4μm | |
| Impurity Content (powder) |
Fe | ≤80ppm |
| Ni | ≤20ppm | |
| Cu | ≤40ppm | |
| Al | ≤30ppm | |
| Si | ≤40ppm | |
| O | ≤800ppm | |
| C | ≤100ppm | |
Note: all the specifications can meet the requirements of customers on high accuracy through machining.
Molybdenum-tantalum targets of our company are mainly applied to:
▲Semiconductor industry.
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