Molybdenum-niobium Target
Molybdenum-niobium targets produced by Achemetal Tungsten & Molybdenum Co., Ltd. include molybdenum-niobium plane targets and molybdenum-niobium rotating targets.
Features of targets manufactured by Achemetal
1. High product density, good product compactness and uniform crystal grains;
2. Higher machining property;
3. Relative density of targets: over 99%, relative density of alloy: over 97%; grain size: less than 50um; thermal resistance of films: below 5%; welded rate with back plates: over 98%, film uniformity after target film formation: over 95%;
Conventional density: 9.3g/cm³~9.5 g/cm³;
Special process density: 9.7g/cm³~9.9 g/cm³
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Molybdenum-niobium Target Parameters |
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Element |
MoNb |
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Composition ratio |
Mo-10.0at%Nb |
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(Nb=10.0±1at%) |
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Purity |
>99.95%(3N5) |
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Typical sample dimension |
Rotate Φ151×Φ135×750mm；Plane 210×112×10mm |
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Density |
>9.3--9.5g/cm3（sintering），9.7--9.9g/cm3（HIP） |
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Hardness |
HV5:170-210 |
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Grain Size |
46μm |
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Appearance |
Ra≤0.4μm |
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Impurity Content |
Fe |
≤80ppm |
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Ni |
≤20ppm |
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Cu |
≤30ppm |
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Al |
≤30ppm |
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Si |
≤40ppm |
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O |
≤800ppm |
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C |
≤100ppm |
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Note: all the specifications can meet the requirements of customers on high accuracy through machining.
Our molybdenum-niobium targets are mainly applied to:
▲Thin-film solar industry, touch control industry, glass industry, semiconductor industry, optical coating industry.
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